Application: Line Width Calibration
Equipment: CD-AFM and CD-SEM
Features: Amorphous Silicon Isolated Line
Traceability: SI units through NIST
Product Range: 25 nm to 110 nm

Reticle Size 6" x 6" x 1/4"
Layout X XY Multiple X
Line Width (nm)
25 NCD625-25X NCD625-25XY  
70 NCD625-70X NCD625-70XY  
110 NCD625-110X NCD625-110XY  
70-110   NCD625-2D-70-110X

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