Application: Resistivity Calibration
Equipment: 4-Point Probes and Eddy Current Gauges
Features: As-Lapped Silicon Wafer
Traceability: SI units through NIST
Product Range: 0.002 - 60 Ohms.cm

Diameter 76.2 mm 200 mm 300 mm
Thickness 508 µm 710 µm 760 µm
ohms.cm Model No. Ohms/Sq. Model No. Ohms/Sq. Model No. Ohms/Sq.
0.002 RS3-0.002 0.04  
0.01 RS3-0.01 0.20 RS8L-0.01 0.14  
0.02   RS12-0.02 0.26
0.03 RS3-0.03 0.59 RS8L-0.03 0.42  
0.1 RS3-0.1 2.0 RS8L-0.1 1.4  
0.3 RS3-0.3 5.9 RS8L-0.3 4.2  
0.9 RS3-0.9 18  
1   RS8L-1 14 RS12-2 26
3 RS3-3 59 RS8L-3 42  
10     RS12-10 132
30   RS8L-30 423  
60   RS8L-60 845  

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