Application: Film Thickness Calibration
Equipment: Single Wavelength Ellipsometer (SWE), Spectroscopic Ellipsometer (SE), Reflectometer
Film: Silicon Nitride
Traceability: NIST
Product Range: 200 Å to 2,000 Å

  Wafer Diameter
Film Thickness (Å) 100 mm 125 mm 150 mm 200 mm
200 NFTS4-200 NFTS5-200 NFTS6-200 NFTS8-200
900 NFTS4-900 NFTS5-900 NFTS6-900 NFTS8-900
1,200 NFTS4-1200 NFTS5-1200 NFTS6-1200 NFTS8-1200
2,000 NFTS4-2000 NFTS5-2000 NFTS6-2000 NFTS8-2000

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