
	Product Overview Contamination Products Silica Contamination Standards Silica Leopard Contamination Standards Silica Particle Solutions Absolute Contamination Standards Edge Contamination Standards Custom Deposition Service Leopard Contamination Standards Reticle Contamination Standards Film Thickness Products Silicon Dioxide Film Thickness Standards Silicon Nitride Film Thickness Standards Dimensional Products NanoCD Standards NanoCD Standards for Mask Handling Tools NanoLattice Pitch Standard Nanolattice Standards for Analytical Instruments NanoLattice Pitch Standard for Mask Handling Tools Surface Topography Standards Surface Topography References AutoLoad Surface Topography Standards Step Height Standards (Quartz) Ultra Thick Step Height Standards AutoLoad Step Height Standards Electrical Products Resistivity Standard ITO Sheet Resistance Standards Solar Products Solar / Photovoltaic Products Recertification Overview How to Recertify Recertification Declaration Form Online Product Registration Form Recertification Intervals / Certificate Copies Quality Support Overview VLSI Quality Traceability and Uncertainty Company Profile VLSI History Technical Papers Terms and Conditions Regulatory Compliance Map and Directions Submit Quote

VLSI Standards can provide custom deposition of polystyrene latex (PSL) spheres on a variety of customer substrates, including wafers, disks, flat panels, photomasks, etc. of any size from a small chip up to a 300 mm wafer (for photomasks please use the specific Reticle Contamination Standard Questionnaire). The substrates can be coated with any films, including copper, as VLSI maintains segregated deposition facilities for Cu-free front-end processing and Cu-contaminated back-end processing. With few limitations, spheres can be deposited in the range from 40 nm to 50 m. Spot deposition or blanket deposition can be done to desired densities, and with customer supplied spheres if desired. A blanket deposition consists of spheres, all of the same size, uniformly distributed on the entire surface of the wafer or substrate. A spot deposition consists of multiple sphere sizes deposited onto a substrate. Each sphere size is deposited into a spot of approximately 20 mm diameter onto the substrate.

Fields marked with an asterisk (*) are required.

Name *

Company Name *

Email *

Address *

City *

State *

Zip Code *

Country *

Phone *

Title *

Use this table to specify blanket depositions

Substrate material Substrate size Films present on the substrate Sphere size Number of spheres

1

2

Use this table to specify spot depositions

Substrate material Substrate size Films present on the substrate Spot # Sphere size Number of spheres

1 1

2

3

4

5

6

7

8

2 1

2

3

4

5

6

7

8

Please add any other special instructions or comments in the space below.


	Products \| Recertification \| Support \| Survey \| Product Registration \| Company \| Contact