Available Models If you would like to request a quote, please indicate the number of standards you'd like for each model. Click on the button to add these items to your quote basket. Model No. Wafer Size (mm) Resistivity (ohm.cm) Sheet Resistance (ohm/Square) Nominal Thickness Part Number Quantity Resistivity Standard Recalibration -- -- -- -- N/A RS3-0.002 76.2 0.002 0.04 508 µm 354_VLSI RS3-0.01 76.2 0.01 0.2 508 µm 355_VLSI RS3-0.03 76.2 0.03 0.6 508 µm 356_VLSI RS3-0.1 76.2 0.1 2.0 508 µm 357_VLSI RS3-0.3 76.2 0.3 6.0 508 µm 358_VLSI RS3-0.9 76.2 0.9 18 508 µm 359_VLSI RS3-3.0 76.2 3.0 60 508 µm 363_VLSI RS3-30 76.2 30.0 600 508 µm 0320748-000 RS8-0.01 200 0.01 0.14 710 µm 999_VLSI RS8-0.03 200 0.03 0.42 710 µm 1000_VLSI RS8-0.1 200 0.1 1.4 710 µm 1001_VLSI RS8-1 200 1.0 14 710 µm 1003_VLSI RS8-3 200 3.0 42 710 µm 1004_VLSI RS8-30 200 30 423 710 µm 1006_VLSI RS12-0.02 300 0.02 0.26 760 µm 1329_VLSI RS12-1.5 300 1.5 20 760 µm 0730567-000 RS12-10 300 10 132 760 µm 1331_VLSI

Model Number Information for Resistivity / Sheet Resistance Standards