Available Models If you would like to request a quote, please indicate the number of standards you'd like for each model. Click on the button to add these items to your quote basket. Model No. Design Description Featured Material Pitch Nominal Height Part Number Quantity STS-Recal Any Any Any Any N/A Note: Recertification of any STS model. STS3-180P 12 mm x 8 mm silicon die with 3 etched pitch clusters Silicon dioxide coated with a uniform layer of platinum 3 µm/10 µm/20 µm 18 nm 412_VLSI STS3-440P 12 mm x 8 mm silicon die with 3 etched pitch clusters Silicon dioxide coated with a uniform layer of platinum 3 µm/10 µm/20 µm 44 nm 414_VLSI STS3-1000P 12 mm x 8 mm silicon die with 3 etched pitch clusters Silicon dioxide coated with a uniform layer of platinum 3 µm/10 µm/20 µm 100 nm 411_VLSI STS3-1800P 12 mm x 8 mm silicon die with 3 etched pitch clusters Silicon dioxide coated with a uniform layer of platinum 3 µm/10 µm/20 µm 180 nm 413_VLSI STS2-180P 12 mm x 8 mm silicon die with 3 etched pitch clusters Silicon dioxide coated with a uniform layer of platinum 1.8 µm/3 µm/5 µm 18 nm 745_VLSI STS2-440P 12 mm x 8 mm silicon die with 3 etched pitch clusters Silicon dioxide coated with a uniform layer of platinum 1.8 µm/3 µm/5 µm 44 nm 418_VLSI STS2-1000S 12 mm x 8 mm silicon die with 3 etched pitch clusters Uncoated silicon dioxide 1.8 µm/3 µm/5 µm 100 nm 749_VLSI STS2-1800S 12 mm x 8 mm silicon die with 3 etched pitch clusters Uncoated silicon dioxide 1.8 µm/3 µm/5 µm 180 nm 751_VLSI

Model Number Information for Surface Topography Standards STS is an acronym for Surface Topography Standard. Each standard contains 3 pitch grids patterned into a single film thickness. The model number identifies the nominal film thickness. Surface Topography Standards are traceable to SI units through NIST.