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Application:
Defect Size Calibration on Wafer Edge and Bevel
Equipment:
Edge Defect Inspection
Material:
Polystyrene Latex Sphere (PSL) on Silicon
Traceability:
SI units through NIST
Product Range:
0.5 µm to 5 µm
Full Wafer Depositions
Wafer Diameter
200 mm
300 mm
Number of Spheres
2,000
2,000
Particle Diameter (nm)
0.5, 1.0, 2.0, and 5.0
ECS8-0.5-5.0-2K
ECS12-0.5-5.0-2K
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