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Application:
Line Width Calibration
Equipment:
CD-AFM and CD-SEM
Features:
Amorphous Silicon Isolated Line
Traceability:
SI units through NIST
Product Range:
25 nm to 110 nm
Reticle Size
6" x 6" x 1/4"
Layout
X
XY
Multiple X
Line Width (nm)
25
NCD625-25X
NCD625-25XY
70
NCD625-70X
NCD625-70XY
110
NCD625-110X
NCD625-110XY
70-110
NCD625-2D-70-110X
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