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Application:
Pitch and Magnification Calibration
Equipment:
CD-SEM
Features:
100 nm pitch etched into silicon
Traceability:
NIST
Reticle Size
6" x 6" x 1/4"
Layout
X
XY
Pitch (nm)
100
NLSM625-0.1X
NLSM625-0.1XY
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