Application: 3-Dimensional Calibration Equipment: Atomic Force and Optical Interformetric Microscopes Features: Silicon Dioxide on Silicon substrate Platinum coated (except 1800 Å model) Traceability: SI units through NIST Product Range: Pitch, X and Y: 1.8 - 20 µm Height, Z: 180 - 1800 Å Feature Dimension Substrate Pitch, X and Y (µm) Height, Z (Å) 12 mm x 8 mm 1.8, 3 and 5 180 STS2-180P 1.8, 3 and 5 440 STS2-440P 1.8, 3 and 5 1,000 STS2-1000S 1.8, 3 and 5 1,800 STS2-1800S 3, 10 and 20 180 STS3-180P 3, 10 and 20 440 STS3-440P 3, 10 and 20 1,000 STS3-1000P 3, 10 and 20 1,800 STS3-1800P