Application:	Resistivity Calibration
Equipment:	4-Point Probes and Eddy Current Gauges
Features:	As-Lapped Silicon Wafer
Traceability:	SI units through NIST
Product Range:	0.002 - 60 Ohms.cm

Diameter 76.2 mm 200 mm 300 mm

Thickness 508 µm 710 µm 760 µm

ohms.cm Model No. Ohms/Sq. Model No. Ohms/Sq. Model No. Ohms/Sq.

0.002 RS3-0.002 0.04

0.01 RS3-0.01 0.20 RS8L-0.01 0.14

0.02 RS12-0.02 0.27

0.03 RS3-0.03 0.6 RS8L-0.03 0.42

0.1 RS3-0.1 2.0 RS8L-0.1 1.4

0.3 RS3-0.3 6 RS8L-0.3 4.2

0.9 RS3-0.9 18

1 RS8L-1 14

1.5 RS12-1.5 20.3

3 RS3-3 60 RS8L-3 42

10 RS8-10 141 RS12-10 135.3

30 RS3-30 600 RS8L-30 423