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Model No.
Featured Material
Nominal Height
Pitch
Design Description
Part Number
Quantity
STR3-180P
Silicon dioxide coated with a uniform layer of platinum
18 nm
3 µm pitch grid
8 mm x 8 mm silicon die with 1.2 mm x 1.2 mm measurement area
407_VLSI
STR3-440P
Silicon dioxide coated with a uniform layer of platinum
44 nm
3 µm pitch grid
8 mm x 8 mm silicon die with 1.2 mm x 1.2 mm measurement area
408_VLSI
STR3-1000P
Silicon dioxide coated with a uniform layer of platinum
100 nm
3 µm pitch grid
8 mm x 8 mm silicon die with 1.2 mm x 1.2 mm measurement area
409_VLSI
STR3-1800P
Silicon dioxide coated with a uniform layer of platinum
180 nm
3 µm pitch grid
8 mm x 8 mm silicon die with 1.2 mm x 1.2 mm measurement area
410_VLSI
STR10-180P
Silicon dioxide coated with a uniform layer of platinum
18 nm
10 µm pitch grid
8 mm x 8 mm silicon die with 4 mm x 4 mm measuremement area
400_VLSI
STR10-440P
Silicon dioxide coated with a uniform layer of platinum
44 nm
10 µm pitch grid
8 mm x 8 mm silicon die with 4 mm x 4 mm measuremement area
402_VLSI
STR10-1000S
Silicon dioxide
100 nm
10 µm pitch grid
8 mm x 8 mm silicon die with 4 mm x 4 mm measurement area
399_VLSI
STR10-1800P
Silicon dioxide coated with a uniform layer of platinum
180 nm
10 µm pitch grid
8 mm x 8 mm silicon die with 4 mm x 4 mm measurement area
Model Number Information for Surface Topography References
STS is an acronym for Surface Topography Standard. Each standard contains 3 pitch grids patterned into a single film thickness. The model number identifies the nominal feature height. The product is shipped as a set: one standard and one reference. STR is an acronym for Surface Topography Reference. References can be ordered separately.