Available Models

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Model No. Model Number Substrate Pitch values Part Number Quantity
NLSM625-0.1 NLSM625-0.1 6" x 6" x 0.25" 100, 200, 400, 800, 1000 nm 1321_VLSI
NLSM625-0.1X-Recal NLSM625-0.1X-Recal 6" x 6" aluminum 100 nm, 200 nm, 400 nm, 800 nm, 1000 nm N/A
NLSM625-0.1XY NLSM625-0.1XY 6" x 6" x 0.25" 100, 200, 400, 800, 1000 nm 1322_VLSI
Note: 2 die, X and Y position
NLSM625-0.1XY-Recal NLSM625-0.1XY-Recal 6" x 6" aluminum 2 die - 100 nm, 200 nm, 400 nm, 800 nm, 1000 nm N/A

Model Number Information for Mask Nanolattice Standards
For magnification calibration of mask-based CD SEMs

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