Application: 3-Dimensional Calibration Equipment: Optical inteferometric microscope and Atomic Force Microscope (AFM) Features: Silicon Dioxide Coated with Chromium Traceability: SI units through NIST Product Range: Pitch (X and Y): 3, 10 and 20 µm Height (Z): 180 Å - 1,800 Å Feature Dimension Wafer Diameter Z (Å) X (µm) Y (µm) 200 mm 300 mm 180 3, 10 and 20 3, 10 and 20 ALSTS8-180 ALSTS12-180 440 3, 10 and 20 3, 10 and 20 ALSTS8-440 ALSTS12-440 1,000 3, 10 and 20 3, 10 and 20 ALSTS8-1000 ALSTS12-1000 1,800 3, 10 and 20 3, 10 and 20 ALSTS8-1800 ALSTS12-1800