Application: Line Width Calibration
Equipment: CD-AFM and CD-SEM
Features: Amorphous Silicon Isolated Line
Traceability: SI units through NIST
Product Range: 25 nm to 110 nm

Wafer Diameter 200 mm 300 mm
Layout X XY X XY
Line Width (nm)
25 NCD8-25X NCD8-25XY NCD12-25X NCD12-25XY
70 NCD8-70X NCD8-70XY NCD12-70X NCD12-70XY
110 NCD8-110X NCD8-110XY NCD12-110X NCD12-110XY

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