Application: Pitch and Magnification Calibration
Equipment: Analytical CD-SEM, AFM
Features: 100 nm pitch etched into silicon
Traceability: NIST

THIN
Single die Thin Mount Adaptor
(Thickness)
Model Number
Pitch (nm)
100
 
0.8 mm NLSM-0.1-Thin-X
 
Dual die Thin Mount Adaptor
(Thickness)
Model Number
Pitch (nm)
100
 
0.8 mm NLSM-0.1-Thin-XY

THICK
Single die Thick Mount Adaptor
(Thickness)
Model Number
Pitch (nm)
100
 
4.2 mm NLSM-0.1-Thick-X
 
Dual die Thick Mount Adaptor
(Thickness)
Model Number
Pitch (nm)
100
 
4.2 mm NLSM-0.1-Thick-XY

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