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Application:
Film Thickness Calibration
Equipment:
Single Wavelength Ellipsometer (SWE), Spectroscopic Ellipsometer (SE) and Reflectometer
Film:
Silicon Dioxide
Traceability:
SI units through NIST
Product Range:
20 Å to 10,100 Å
Wafer Diameter
Film Thickness (Å)
100 mm
125 mm
150 mm
200 mm
300 mm
20
FTS8-20
FTS12-20
45
FTS4-45
FTS5-45
FTS6-45
FTS8-45
FTS12-45
75
FTS4-75
FTS5-75
FTS6-75
FTS8-75
FTS12-75
120
FTS4-120
FTS5-120
FTS6-120
FTS8-120
FTS12-120
250
FTS4-250
FTS5-250
FTS6-250
FTS8-250
FTS12-250
500
FTS4-500
FTS5-500
FTS6-500
FTS8-500
FTS12-500
1000
FTS4-1000
FTS5-1000
FTS6-1000
FTS8-1000
FTS12-1000
2,000
FTS4-2000
FTS5-2000
FTS6-2000
FTS8-2000
FTS12-2000
4,000
FTS4-4000
FTS5-4000
FTS6-4000
FTS8-4000
FTS12-4000
6,750
FTS4-6750
FTS5-6750
FTS6-6750
FTS8-6750
FTS12-6750
10,100
FTS4-10100
FTS5-10100
FTS6-10100
FTS8-10100
FTS12-10100
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